High density batch bonding technology for chiplet design

2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)(2022)

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摘要
In order to meet demands for high-density, cost-efficient and highly flexible packages, a package method is developed to support high-performance computing and artificial intelligence applications. A batch bonding technology is proposed to achieve a chiplet integrated circuit block having high density chip distribution. Process concept and electric performance are discussed. Finally, test module p...
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关键词
Very large scale integration,Bonding,Integrated circuit reliability,Artificial intelligence
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