Negative Gate Bias TDDB evaluation of n-Channel SiC Vertical Power MOSFETs

2022 IEEE International Reliability Physics Symposium (IRPS)(2022)

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摘要
With the steep expansion of the n-type 4H-SiC power metal-oxide-semiconductor field-effect transistor (MOSFET) market space, gate oxide reliability is gaining more and more attention. Although there exist several reports dealing with the bias temperature instability (BTI) under both positive and negative gate biases, gate oxide lifetime evaluations predominantly focus on positive gate bias time-de...
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关键词
Temperature measurement,MOSFET,Silicon carbide,Failure analysis,Logic gates,Charge carrier processes,Gate leakage
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