Near-real-time diagnosis of electron optical phase aberrations in scanning transmission electron microscopy using an artificial neural network

Ultramicroscopy(2023)

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摘要
•We make use of an artificial neural network to measure the low-order aberrations values, such as defocus, astigmatism, coma, and spherical aberration, from a defocused Ronchigram on an amorphous carbon thin film.•We compare numerical and experimental results with the more precise but slower procedures integrated in the probe corrected system.•The method proposed is very fast, by requiring a single image, and it is promising in view of real-time monitoring of quickly varying aberrations.
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关键词
Electron optical phase,Aberration correction,Neural network,Artificial intelligence,Spatial resolution,Scanning transmission electron microscopy
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