Investigation of Coercive Field Shift During Cycling in HfZrO ₓ Ferroelectric Capacitors

Puyang Cai,Hao Li,Zhiwei Liu,Tianxiang Zhu,Min Zeng,Zhigang Ji,Yanqing Wu,Andrea Padovani,Luca Larcher,Milan Pešić,Runsheng Wang,Ru Huang

IEEE Transactions on Electron Devices（2022）

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摘要

To fully understand the mechanisms for shifting of coercive field ( ${E}_{\text {c}}$ ) during the bipolar stress cycling in doped HfO2 ferroelectric (FE) material, we present a systematic study with both characterization and simulation on HfZrOx (HZO) capacitor. First, with the help of time-depende...

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关键词

Iron,Stress,Capacitors,Switches,Electrodes,Weibull distribution,Dielectric breakdown

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