Flexible and high-resolution surface metrology based on stitching interference microscopy

Shanyong Chen,Wenwen Lu,Jingyang Guo,Dede Zhai,Weiwei Chen

Optics and Lasers in Engineering（2022）

引用 6|浏览3

暂无评分

摘要

•Optical surface metrology based on stitching interference microscopy.•Flexible adaptability to sophisticated variation of the aspheric surface shape.•"One-stop" measurement of surface form, waviness and roughness simultaneously.•Applied to even asphere, “gull-wing” surface and microstructured curved surface.•Verified with CGH null test and stylus profilometry for 10 mm-class optics.

查看译文

关键词

Optical surface metrology,Interference microscopy,Stitching,Aspherical surface

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要