Three-dimensional holographic parallel focusing with feedback control for femtosecond laser processing

•Three-dimensional holographic parallel focusing with feedback control is proposed for the first time.•Implementations of measurement of three-dimensional focusing intensities and a recalculation of the corresponding computer-generated hologram from the measurement simultaneously.•Significant improvement of the uniformity for the 3D intensities and the consistency for the laser processed micro-holes proved that the effectiveness of this method and has the great potential to be applied to high-precision machining.