Growth of epitaxial SiGe alloys as etch-stop layers in germanium-on-insulator fabricationA Abedin,K Garidis, P Asadollahi, PE Hellström,M Östlinguser-5e9d449e4c775e765d44d7c9（2021）引用 0|浏览8暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
