Modified astigmatic beam technique for laser writing.
APPLIED OPTICS(2022)
摘要
The ultrafast laser writing of optical waveguides and devices is increasingly ubiquitous among the photonics community, mostly for its flexibility and three-dimensional fabrication capability. The well-known astigmatic beam technique is the simplest method to inscribe near-circular cross-section waveguides. In this paper, we report on a significant enhancement to the widely used astigmatic beam technique that makes it more flexible and yields a more circular waveguide cross section. By simply superposing a long-focus lens before the laser inscription objective lens, we demonstrate that the normalized squared radial deviation from a perfectly circular waveguide cross section can be reduced to <4×10-4, which is a significant improvement compared to >0.1 typically obtained using the standard astigmatic beam technique, or >0.7 with a Gaussian beam. The modified technique also makes it easy to use the full power delivered by the laser, which is not usually the case with the standard technique. A technique to optimize the waveguide shape prior to the inscription by in situ laser-induced plasma emission imaging is also discussed.
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