Research Progress of MEMS Inertial SwitchesMin Liu, Xinyang Wu,Yanxu Niu,Haotian Yang,Yingmin Zhu,Weidong WangMICROMACHINES（2022）引用 13|浏览25关键词MEMS,inertial switch,threshold acceleration,sensitive direction,contact effect,fabricationAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
