UV Light and H₂ Gas Dual Sensing Properties of ZnO/InGaZnO Match-Head Nanorods

Yu-Sheng Tsai,Deng-Yi Wang,Ya-Hsuan Lin,Yu-He Zhang,Jia-Jie Jhang,Cheng-Shan Chen,Yew Chung Sermon Wu,Wen-Chang Huang,Tien-Chai Lin,Hsiang Chen,Jung Han

IEEE Electron Device Letters（2022）

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摘要

In this study, ZnO/InGaZnO (IGZO) match-head nanorods (NRs) were fabricated for light/gas dual sensors. A match-head IGZO structure was successfully grown on ZnO NRs. Scanning electron microscope and transmission electron microscope images reveal that amorphous IGZO capsule-like heads were sputtered on the top of crystallized ZnO NRs. Results of X-ray photoelectron spectroscopy spectra indicate th...

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关键词

Sensors,II-VI semiconductor materials,Zinc oxide,Hydrogen,Sensitivity,Sputtering,Nanostructures

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