A $\boldsymbol{210}\times \boldsymbol{340}\times \boldsymbol{50}\boldsymbol{\mu}\mathbf{m}$ Integrated CMOS System f0 $\mathbf{r}$ Micro-Robots with Energy Harvesting, Sensing, Processing, Communication and Actuation

Built upon significant research into ultra-low power CMOS designs, complete sub-mm3-wireless sensor systems have been introduced [1]–[7] that include energy harvesting, sensing, processing, and communication. However, a key missing component in such systems is actuation, which could enable a host of new applications. Recently, a new class of electrochemical actuators that operate at low...