Time of Flight – Secondary Ion Mass Spectroscopy Profiling of Self-Assembled Monolayer Patterns Based on Vapor Deposition Technique

Shi Li,Hongru Zhang,Zheng Liu,Junquan Xu,Guofang Fan,Wei Li,Qi Li,Xiaodong Hu,Gaoshan Jing

APPLIED SURFACE SCIENCE（2022）

Cited 0|Views34

Key words

Time of flight-secondary ion mass spectroscopy&nbsp,(TOF-SIMS),Two-dimensional mapping analysis,Three-dimensional depth profiling,Self-assembled monolayer (SAM),Self-assembled monolayer vapor deposition

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