Monolithic Integration of Multi-Spectral Optical Interference Filter Array on Thin Film Amorphous Silicon Photodiodes

Hydrogenated amorphous silicon thin film photodetectors combined with optical filters are routinely used for biological detection applications based on fluorescence. Monolithic integration of these filters to the photodetectors further enhances the portability and simplicity of the system. However, due to the multitude of fluorophores used in such applications, it is often necessary to combine mul...