Study of Uniformity of Atmospheric Pressure Plasma Microjet Array for Maskless Parallel Micropatterned Etching
Plasma Processes and Polymers（2022）
Key words
dielectric barrier discharges,jet-to-jet interaction,plasma etching,plasma microjet array,uniformity
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined