NLS based Modeling and Characterization of Switching Dynamics for Antiferroelectric/Ferroelectric Hafnium Zirconium Oxides

Yu–Chen Chen,Kuo–Yu Hsiang,Ying–Tsan Tang,Min-Hung Lee,Pin Su

2021 IEEE International Electron Devices Meeting (IEDM)（2021）

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摘要

In this work, we have conducted an NLS-based Monte-Carlo modeling and characterization for antiferroelectric/ferroelectric (AFE/FE) Hf1-xZrxO2 (HZO). With the coexistence of orthorhombic-phase (FE) and tetragonal-phase (AFE) grains and the crucial consideration of back-switching field, our generalized NLS model is capable of describing the switching dyna...

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关键词

Solid modeling,Pulse measurements,Permittivity measurement,Computational modeling,Capacitors,Switches,Predictive models

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