Heterodyne moire interferometry in micrometrology

By modifying the hardware of a heterodyne moire interferometer (HMI) the measurement range, accuracy and efficiency of the new system can be improved significantly. With this new system, whole-field measurement of displacements and strains can be achieved by translating the photodetectors. Test results have demonstrated that this new HMI system is potentially a good alternative tool for micro-metrology.© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.