Microstructural characterisation of zinc-blende Ga 1-x Mn x N grown by MBE as a function of Mn flux

Zinc-blende Ga1−xMnxN epilayers grown by plasma assisted molecular beam epitaxy as a function of Mn flux have been assessed using a variety of structural characterisation techniques. Increasing Mn flux is associated with the build up of a Mn surfactant layer during the early states of growth and a transition from zinc-blende single phase growth to zincblende/ wurtzite mixed phase growth.