A Comparison of Primary Gas Flow Standards Spanning the Range from 10 sccm N2 to 10 slm N2

Casey Rombouts, Michael Bair, Jean Barbe,John D. Wright,Rainer Kramer,Zdenek Krajicek

NCSLI Measure（2014）

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摘要

We describe an international comparison of gas flow standards spanning the range from 2.1 × 10−4 g/s (10 sccm) of nitrogen to 0.21 g/s (10 slm) of nitrogen. For each of the participating laboratori...

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