Silicon Nitride Film Formations Using the Magnetic-Mirror-Confined Plasma Source for Minimal Fab SystemTetsuya Goto,Kei-ichiro Sato, Yuki Yabuta,Shigetoshi Sugawa,Shiro HaraThe Japan Society of Applied Physics(2017)引用 0|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要