Consequences of Non-uniform Expansion of InP-on-Si Wafers for the Performance of Buried Heterostructure Photonic Crystal Lasers

Aurimas Sakanas,Yi Yu,Elizaveta Semenova,Luisa Ottaviano,Hitesh Kumar Sahoo,Jesper Mørk,Kresten Yvind

Advanced Photonics 2018 (BGPP, IPR, NP, NOMA, Sensors, Networks, SPPCom, SOF) (2018), paper ITh1B.4（2018）

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摘要

E-beam metrology is employed to investigate the consequences of non-uniform expansion of 250nm InP layer bonded to Si substrate by BCB and direct wafer bonding for the performance of photonic crystal lasers with buried heterostructures.

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