Modelling and Improving Performance of Inductors in a Silicon Photonic Process

Ahmadreza Farsaei,Reza Molavi,Shahriar Mirabbasi

Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF) (2016), paper JTu4A.14（2016）

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摘要

Considering inductors' large footprint in electronic-photonic integrated circuits, we implemented them in the lower cost photonic process instead of higher cost microelectronic process and improved their performance using a silicon etching technique.

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