3D Fin Waveguide on 10nm Gate Oxide Bonded Double-SOI for Low VΠL Accumulation Modulator

J. Byers,K. Debnath,H. Arimoto,M. K. Husain,M. Sotto,Z. Li,F. Liu,A. Khokhar,K. Kiang,S. A. Boden,D. J. Thomson,G. T. Reed,S. Saito

international conference on group iv photonics（2018）

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摘要

We propose a new design for a low VπL accumulation optical modulator using 3-Dimensional (3D) Fin-waveguides on double Silicon-On-Insulator (SOI). We have introduced and demonstrated a novel, self-aligned patterning process to pattern the bottom SOI layer using anisotropic wet etching.

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关键词

SiO2 bonding,double-SOI,TMAH etching,fin waveguide

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