Demonstration of a High Q-factor Microring Resonator Fully Suspended by a Subwavelength Sidewall Grating

Soha Yousuf,Anatol Khilo,Marcus S. Dahlem

Frontiers in Optics / Laser Science (2018), paper JTu2A.92（2018）

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摘要

A microring resonator fully suspended by a subwavelength sidewall grating is demonstrated, with measured quality factor of 125k around 1550 nm. The structure is promising for sensing applications, with predicted sensitivities up to 1250 nm/RIU.

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