Integration of Superconducting Nanostripe Single-Photon Detectors with Dielectric Waveguides for Silicon Quantum Photonic Integrated Circuits

OSA Quantum 2.0 Conference (2020), paper QTu8A.2(2020)

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摘要
We report on design, fabrication, and characterization of superconducting nanostripe single-photon detectors integrated with dielectric optical waveguides, whereby part of the upper cladding is removed to enhance absorption of photons by the superconducting nanostripes.
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关键词
dielectric waveguides,single-photon
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