Early Detection of Cancer using Nano-Fabrication Technology MEMS Cantilever Sensor

Social Science Research Network(2021)

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摘要
Lots of available biosensor are not portable for the detection of disease for that bulky instruments are required. To overcome these problems, we can use microstructure based biosensor. The sensor is Micro electro Mechanical Sensor (MEMS) based cantilever. Here, in this article simulating cantilever by changing chemical materials and parameters. For the different cancer diseases like Brest cancer cu(copper) and for heart cancer gold material were used to simulate cantilever. Laser beam and photo detector technology are bulky and costly also. Instated of that cantilever having dimension are width 1 micro meter, length 4 micrometer and height of cantilever is varies in between 25 to 50 nm which gives huge sensitivity. In this paper simulation of the cantilever based on various materials as per the changes in resistance and capacitance effect analysis, cancer tissues behaviour, and identify the exact state of cancer.
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