Surface Wave Technique at Millimeter Waveband for Semiconductor Testing by Photoexcitation

Alexey A. Vertiy,S. V. Mizrakhy, Alexander Uzlenkov, Peter Ersland,S. Mil'shtein

2019 IEEE 2nd Ukraine Conference on Electrical and Computer Engineering (UKRCON)（2019）

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摘要

A new surface wave technique at millimeter waveband 53-225GHz has been developed for non-contact, non-destructive testing of semiconductors using photoexcitation. Both positive and negative signal polarities are observed for semiconductor samples and metal-semiconductor structures. The scheme of experimental setup is presented. Preliminary experimental results are illustrated and discussed.

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关键词

millimeter wave,non-destrucrive testing,photoexcitation,semiconductor,surface wave,solar cell

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