E-H Transitions in Ar/O 2 Inductively Coupled Plasmas for Varying Antenna Aspect Ratio - ExperimentWalter Gekelman,Patrick Pribyl,Yuchen Qian,Alex Paterson,Tugba Piskin,Mark J. KushnerBulletin of the American Physical Society(2021)引用 0|浏览2暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要