Hybrid Graphene-WS 2 Mach-Zehnder modulator on passive silicon waveguide

european quantum electronics conference(2021)

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摘要
2D materials such as graphene have attracted a lot of interest in recent years because of their unique electrical and optical properties [1] - [3] . For example, a graphene Mach-Zehnder modulator (MZM) with 2.8Vmm modulation efficiency and 5GHz bandwidth has been demonstrated in the literature [2] . However, one of the challenges for current graphene MZM is graphene’s relatively high insertion loss. Potential solutions have been proposed, such as improving the quality of graphene or operating the device within graphene’s transparency region [4] . Recently, transition metal dichalcogenides (TMDC) have shown a strong electro-refraction effect in the C band, accompanied by only a limited loss increase [3] , which is promising for high efficiency, low loss Mach-Zehnder modulators and switches.
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hybrid graphene-tungsten disulfide Mach-Zehnder modulator,CMOS semiconductor fab,top-down microscope image,interference effect,path length difference,electrochemical method,gate oxide,ALD,thermal oxide,oxide planarization,SOI substrate,electro-refraction effect,graphene transparency region,transition metal dichalcogenides,insertion loss,2D materials,modulation efficiency,graphene Mach-Zehnder modulator,passive silicon waveguide,frequency 5.0 GHz,size 100 mum to 500 mum,WS2-AlOx-C-Pd-Ni,Si
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