Beam stability of buried-heterostructure quantum cascade lasers formed by ICP-etching and HVPE regrowth

Scaling the coherent power of mid-infrared (IR)-emitting quantum cascade lasers (QCLs) to the multi-watt range remains an important objective for applications where the laser beam needs to travel through air to remote targets, such as freespace communication links. For such applications requiring long-range pointing accuracy, measurements of beam stability are also important. We present beam-quality measurement results of narrow-ridge (4-5 μm), 4.6 μm-emitting buriedheterostructure (BH) QCLs. A 40-stage, step-tapered active-region (STA) structure was grown by MOCVD, and ICP etching was used to make deep ridges. InP:Fe was preferentially regrown in the field regions by using an SiO2 mask for ridge etching and Hydride Vapor Phase Epitaxy (HVPE). The HVPE process is attractive for selective regrowth, since high growth rates (0.2-0.3 μm/min) can be utilized, and highly planar top surfaces can readily be obtained. HVPE regrowth has been previously employed for BH devices of MBE-grown QCL ridges, but beam-stability measurements were not reported. HR-coated, 7.5 mm-long devices were measured under QCW operation (100 μsec pulse width, 0.5%-10% duty cycle) – very good beam quality factors, M2 < 1.2, were observed for both 4 μm and 5 μm ridge widths, but the narrower ridge exhibited better pointing stability. Collimated 5 μm-wide BH devices displayed some small degree of centroid motion with increasing power (< 0.125 mrad). This corresponds to a targeting error of ~1.25 cm over a distance of 100 m. Significantly improved lateral-beam stability was observed for narrower ridge width, although at the expense of reduced output power.