On-chip single photon emission from a waveguide-coupled two-dimensional semiconductor

In recent years, two-dimensional semiconductor quantum emitters have gotten substantial attention from the solid-state quantum photonics community. Their potential for on-chip integration in silicon-based photonics makes them an ideal candidate to realize large-scale hybrid quantum photonic circuits. Given the strain-induced quantum emitter formation in two-dimensional WSe2, coupling of such quantum emitters into a SiN photonic waveguides is very promising. However, demonstration of single-photon emission into a waveguide has been elusive so far. Here, we show single-photon emission of strain-induced quantum emitters in a 2D flake integrated into a SiN waveguide. We take advantage of the waveguide edges as nucleation sites for quantum emitters. We observe single-photon emission coupled into the waveguide with a g(2)(0) = 0.15±0.09. This result opens up the way towards large-scale 2D emitter integration in on-chip quantum photonic circuits.