Effect of Cu doping ZrO₂ Thin films on physical properties grown by spray pyrolysis deposition

Abstract Zirconium oxide (ZrO2) and Cu doped ZrO2 films were grown successfully by spray pyrolysis deposition (SPD). The structural, surface morphology and optical properties were analyzed. XRD patterns reveal films polycrystallinity and monoclinic phase intensity of ZrO2 with preferred orientation along M (111) plane increasing with increasing doping. The grain size was found to increase from 25 nm to 29.83 nm with increase in Cu doping. AFM images assure that films were nanostructure and the surface morphology and roughness depend on doping concentration. The optical bandgap energy decreases from 3.2 to 2.6 eV with increasing doping concentration.