Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

Martin Šarbort,Miroslava Holá,Jan Pavelka,Šimon Řeřucha,Jindřich Oulehla,Tomáš Fořt,Josef Lazar

Imaging and Applied Optics Congress (2020), paper HTh5H.2（2020）

引用 5|浏览0

暂无评分

摘要

We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.

查看译文

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要