The Validity of the Perturbation Model for the Propagation of MSF Structures

Optical Design and Fabrication 2019 (Freeform, OFT) (2019), paper FW4B.1(2019)

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摘要
The perturbation model is often employed when assessing performance degradation caused by mid-spatial frequency (MSF) structures. However, the model’s validity is poorly understood. We present a rule of thumb regarding this validity.
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