H 2 S photoacoustic detection with an integrated THz gas sensor for food quality control

Elias Akiki, Marie-Hélène Mammez,Guillaume Ducournau,Benjamin Walter,Gaël Mouret,Jean-Francois Lampin,Mathias Vanwolleghem

international conference on infrared, millimeter, and terahertz waves（2021）

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摘要

THz photoacoustic (PA) detection of H 2 S gas concentrations on the order of 200 ppm using a Poly-Si membrane as a PA microphone is reported. This result is a first step towards the demonstration of a fully integrated THz PA gas sensor with an expected sensitivity of 10’s of ppb.

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关键词

photoacoustic detection,food quality control,poly-Si membrane,PA microphone,PA gas sensor,integrated THz gas sensor,PA detection,gas concentrations,Si,H2S

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