Increasing the laser induced damage resistance of ultraviolet antireflective coatings by mitigation of damage precursors
Laser Congress 2020 (ASSL, LAC) (2020), paper AW1A.6(2020)
摘要
We demonstrate the mitigation of nano-sized damage precursors during the manufacturing of IBS-coatings using bombardment with a secondary ion source and laser conditioning with a nanosecond-pulsed laser. Optical coatings show a significantly increased damage threshold.
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