Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications

D. Jonker,Zeinab Jafari,J.P. Winczewski,C. Eyovge,Johan W. Berenschot,Niels Roelof Tas, Johannes G.E. Gardeniers,I. De Leon,Arturo Susarrey-Arce

OSA Advanced Photonics Congress (AP) 2020 (IPR, NP, NOMA, Networks, PVLED, PSC, SPPCom, SOF) (2020), paper NoM3C.5（2020）

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摘要

Combined hybrid lithography and sputter redeposition enable reproducible wafer-scale fabrication of gold hollow nanopillars with relatively large field enhancement verified both numerically and experimentally. The application of such structures is demonstrated with surface-enhanced Raman scattering (SERS).

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