Fully Integrated Electronic–Photonic Biosensor for Label-Free Real-Time Molecular Sensing in Advanced Zero-Change CMOS-SOI Process

Label-free miniaturized optical sensors can have a tremendous impact on highly sensitive and scalable point-of-care (PoC) diagnostics by monitoring in real-time molecular interactions without any labels. However, current biophotonic platforms are limited by complex optical and external readout equipment, precluding their use in a PoC setting. In this work, we address this challenge by using a first of its kind fully integrated biosensing electronic–photonic system-on-chip (EPSoC) utilizing microring resonators (MRRs) co-integrated with on-chip electronics in a high volume advanced electronic process. We demonstrate the sensing capabilities of the EPSoC, implemented in GF 45-nm RFSOI, by monitoring real-time binding events of streptavidin molecules, unlocking the door toward true monolithic lab-on-chip (LoC) photonic sensors for PoC applications.