Impact of Molybdenum Oxide Electrode on the Ferroelectricity of Doped-Hafnia Oxide Capacitors

Ruiting Zhao,Ting Liu,Xiaoyue Zhao,Houfang Liu,Minghao Shao,Qixin Feng,Xichen Sun,Xiaoming Wu,Yi Yang,Tian-Ling Ren

IEEE Transactions on Electron Devices（2022）

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摘要

In this article, we investigate the role of MoOx oxide electrodes on the ferroelectric properties of hafnium zirconium oxide (HZO) capacitors. The MoOx oxide electrodes were deposited under different oxygen partial pressure ratios ( $\text{O}_{\text {ppr}}$ : 0%, 5%, 10%, ...

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关键词

Electrodes,Tin,Capacitors,Leakage currents,Zirconium,X-ray diffraction,Sputtering

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