Thermal and Electrical Property of Silicon with Metastable Phases Introduced by HPT ProcessMasamichi Kohno,Mizuki Kashifuji,Kensuke Matsuda,Harish Sivasankaran,Yoshifumi Ikoma,Makoto Arita,Shenghong Ju, Junichiro Shiom,Zenji Horita,Yasuyuki Takataspringer引用 0|浏览0暂无评分关键词silicon,metastable phases,hpt processAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要