Automated Contactless Defect Analysis Technique Using Computer Vision

Franco Stellari,Chung-Ching Lin,Thomas Wassick,Thomas Shaw,Peilin Song

International Symposium for Testing and Failure AnalysisISTFA 2018: Conference Proceedings from the 44th International Symposium for Testing and Failure Analysis（2018）

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摘要

Abstract In this paper, an automated contactless defect analysis technique using Computer Vision (CV) algorithms is presented. The proposed method includes closed-loop control of optical tools for automated image collection, as well as advanced image analysis methods to improve image quality and detect potential defects. As an example, the technique was successfully used to identify delamination defects along the perimeter of a large test chip.

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