The Reliability Design of Switch Chip Based on THENA Process Stimulation System

Abstract This paper mainly focuses on the 2CK6642 silicon switch diode chip, which is mainly used for the surface-mounted packaging device of CLCC-3 metal ceramic. Different from that of ordinary diode, the internal structure of 2CK6642 silicon switch diode has a high resistance region I in the middle of Type P and Type N silicon materials, forming a P-I-N structure. Silvaco TCAD interactive tools, i.e. ATHENA process stimulation system and ATLAS device stimulation system, are used to conduct the design and stimulation of 2CK6642 silicon switch diode chip, so that alternative plugging with external devices could be achieved finally.