Chemical Vapor Deposition (CVD) Technique for Nanomaterials Deposition

Chemical Methods for Processing Nanomaterials(2021)

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摘要
Chemical Vapor Deposition (CVD) method is now a well-known method. In this method, several modifications have been done to create a favorable environment for the synthesis of various nanomaterials. Thus, some of these nanomaterials are commercially available. This chapter involves the detailed description on all modified CVD techniques reported so far by various research groups. Materials developed by these methods are also discussed with detailed examples.
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关键词
deposition,cvd
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