Stacked Source/Drain Electrode Structure of InGaZnO Thin-Film-Transistor for Low Contact Resistance and Suppressing Channel Shortening Effect

J. Kataoka, N. Saito, T. Ueda,T. Tezuka, T. Sawabe,K. Ikeda

Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials(2018)

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