Investigation of coherency stress-induced phase separation in AlN/Al_xGa_1−xN superlattices grown on sapphire substrates

Weizhen Yao,Fangzheng Li,Lianshan Wang,Sheng Liu,Hongyuan Wei,Shaoyan Yang,Zhanguo Wang

CrystEngComm（2020）

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摘要

Suppression of compositional non-uniformity in AlxGa1−xN layers by using AlN/AlxGa1−xN superlattices through adjusting stresses in AlN/AlxGa1−xN layers is demonstrated.

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Investigation of coherency stress-induced phase separation in AlN/AlxGa1−xN superlattices grown on sapphire substrates

Investigation of coherency stress-induced phase separation in AlN/Al_xGa_1−xN superlattices grown on sapphire substrates