Atomic Layer Deposition of Al2O3 Using Trimethylaluminum and H2O: The Kinetics of the H2O Half-CycleBrent A. Sperling,Berc Kalanyan,James E. MaslarThe Journal of Physical Chemistry C(2020)引用 15|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要