Eutectic Sb7.4Te92.6 thin film for non-volatile phase-change memories

Microelectronics International(2019)

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摘要
Purpose The purpose of this paper is to investigate the structure and electrical properties of eutectic Sb7.4Te92.6 as made thin films to evaluate their potentiality for application to non-volatile phase-change memories. Design/methodology/approach The films were prepared by the pulsed laser deposition technique. The films were characterized by using X-ray diffraction in grazing-incident geometry, differential scanning calorimetry, Raman spectroscopy and transversal current–voltage curves. Findings The memory effect state, characteristic of a typical phase-change memory material, was observed. The temperature of crystallization was about 100ºC. Research limitations/implications Further studies on endurance, scaling and SET/RESET operations are needed. Practical implications One of the main characteristic values, the hold voltage and the threshold voltage values, were about 0.85 and 1.2 V, respectively, in a line with those of Ge2Sb2Te5, GeTe and Sb2Te being considered to date as the main compounds for phase-change memory devices. Originality/value The conduction mechanism in the amorphous regime is highly agreed with the Poole–Frenkel effect in deep traps.
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