Advanced Diffusion Strategies for Junction Formation in Germanium

Davide De Salvador,Francesco Sgarbossa,Gianluigi Maggioni,Enrico Napolitani,Chiara Carraro,Sara Maria Carturan,Walter Raniero,Stefano Bertoldo,Ruggero Milazzo,Virginia Boldrini,Gian Andrea Rizzi, Daniel Ricardo Napoli,Alberto Carnera

The 37th International Symposium on Dynamical Properties of Solids（2019）

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摘要

The investigation of innovative dynamical processes for the fabrication of highly doped andhigh quality Ge layers is currently a hot topic in many applicative fields such as nanoelectronics,photonics and radiation detectors. [...]

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