Development of a fully integrated micro-power source based on a micro-silicon fuel cell and a mems hydrogen generator

This paper introduces a fully integrated millimeter scale power source based on a micro-silicon fuel cell and a MEMS hydrogen generator.The integrated devices are fabricated from silicon wafers using conventional MEMS fabrication processes.In this design, hydrolysis reaction of calcium hydride and water is used to generate hydrogen and the hydrogen generation rate is controlled by a microfluidic self-regulating mechanism, which can control the hydrolysis reaction based on the load.Design, fabrication, and testing results of a prototype system are described.One of the devices can produce 90 μW for 6 hrs with a maximum power of 0.17 mW, and another one can produce 30 μW for 26 hours with a total energy density of 100 Whr/L.