Direct measurements of anchor damping in pressure-limited ring resonators

G.D. Vukasin, J. Rodriguez, L. Comenencia Ortiz, G.M. Glaze,C.H. Ahn, Y. Yang, J. Lake, R.N. Candler,T.W. Kenny

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest(2018)

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