A high-mass, eight-fold symmetric silicon carbide mems gyroscopeE. Cook, M. Tomaino-Iannucci, J. Bernstein, M. Weinberg,J. Choy, K. Hobart, L. Luna,M. Tadjer, R. Myers-Ward, F. Kub,Y. Yang,I. Flader2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest（2018）引用 5|浏览0暂无评分关键词silicon,high-mass,eight-foldAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
